일반기술
Size Adjustable and Changeable Capacity Diode
This invention is about size adjustable and changeable capacity diode which gives more flexibility designing Epi layer and which has electric capacity and can be designed with other active chips. According to the invention, size adjustable and changeable capacity diode, which is processed with the combination of active layer etching, selective Epi layer growth, ion insertion, is provide. Such size adjustable and changeable capacity diode changes electricity capacity as pattern of mask so that it is more compatible with other chips and has bigger electric capacity.
기술정보
- 기술분류
- 전기·전자 > 반도체 공정 (B63)
- 보유기관
- 한국과학기술원
- 기술유형
- 일반기술
- 등록일
- 2000-04-29
- 데이터 갱신일
- 정보 없음
상세설명
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